Working table size (mm) 400*200
X-axis travel (mm) 250
Z-axis travel (mm) 150
Y-axis travel (mm) 100 (for focus) Turning range ±15 degree
Resolution (X-axis, Z-axis) 0.5µm
The indication error of coordinate (µm) (4+L/25) (L is the length of the work pieces to be measured, unit: mm) Screen size (mm) 400
Screen rotary range 0-360 degree
Rotary angle Resolution 1 or 0.01
Objective: 10X
Illumination Transmission: 24V/150W, cooling by fans. Reflection: 21V/150W, illuminated by two fibers, cooling by fans. Power 110V/220V (AC) 50/60Hz total power=400W
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